Semiconductor Technology (Markus-Christian Amann)

Major areas of research are on modern technologies of III-V compound semiconductors, including epitaxy, lithography and etching, and their application in electronic and optoelectronic devices. Molecular beam epitaxy with solid sources (MBE) and gas sources (CBE with group III-alkyls and V-hydrides) is the basis for the controlled growth of heterostructures on GaAs- and InP-substrates for device oriented research, whereas selective growth on masked and patterned substrates is investigated for optoelectronic integration and direct synthesis of one- or quasi zero-dimensional structures of nanometer dimensions. Lateral dimensions in the 100 nm range are obtained by e-beam lithography. Reactive ion etching with high material selectivity and control in monolayer dimensions is utilized for device processing. The device research focuses on key devices, particularly for advanced photonic applications. This includes electronically wavelength tunable lasers, singlemode distributed feedback (DFB) lasers, vertical cavity surface emitting lasers and long wavelength lasers (>1.55 µm) for sensing applications. The development of mathematical models plays an important role for the design and optimization of technological processes and device performance.

The main research projects of E26 are laser devices like Vertical Cavity Surface Emitting Lasers (VCSELs) for sensing applications as well as for high-speed communication systems. For applications in the mid infrared range research on efficient injector less Quantum Cascade Lasers is performed. Furthermore development work in creating single photons in the telecommunications range (1.3µm and 1.5µm) is established.

TUM Technische Universität München TUM Technische Universität München Physik Department Elektrotechnik und Informationstechnik TUM Technische Universität München

Events & News

15 Mar 2017

Dr. Kai Müller admitted to the “Junges Kolleg” of the Bavarian Academy of Sciences   more

27 Feb 2017

Two-photon pulses from a single two-level system   more

05 Aug 2016

Best Poster Award at iNow 2016 for Hannes Schmeiduch   more

27 Jul 2016

Best Poster Award for "Few-QD nanolaser" at PECS-XII   more

13 Jul 2016

Best Poster Award at HeFIB for Julian Klein   more


May 02, 2017

Simulation of mesoscopic solar cells: Challenges and solutions, towards a multiscale approach   more