Equipment

2 Varian Mod-GenII MBE Systems (AlGaInAsP and AlGaInAsSb)

AIXTRON MOVPE AIX200/4 (AlGaInAsPSb)

GS-MBE Mod-GenII (AlGaInAsPSbN)

Home-made Photoluminescence Measurement Setup

FTIR Photoluminescence Measurement Setup Biorad FTS40

X-Ray Diffractometry measurement with STOE STADI

RX-Ray Diffractometer BEDE QC1a

Scanning Electron Microscope Jeol JSM6400 Electron Beam Lithography

Mask Aligner Karl Süss MA6

Mask Aligner Karl Süss MJB3

Surface Profiler Tencor a-Step 200

Surface Profiler Dektak 6M

RIE Etching System Leybold LE303 with 3 Reactors Reactive Ion Etching with Cl2, CH4, CF4 Abscheiden von Si3N4

RIE Etcher Oxford Inbstruments PlasmaLab 80 Plus Structuring of BCB with CF4

Plasma Diagnostics with Optical Emission Spectroscopy Mikropack PlasCalc 2000

Ozone Oxidation Oven

Plasma Processor TePla 300

Plasma Processor TePla 300 E

Sputtering System Materials Research Corporation 8620 for SiO2 and Si3N4

Sputtering System Leybold Z400S for Ti, Pt, and Au

Electron Beam Evaporator Varian VT118 for Al, Ti, Pt, and Au

Electron Beam Evaporator 4TEC R650Q for Metals

Thermal Evaporator for Ge, Ni, and Au

Electron Beam Evaporator for Dielectrics

Home-made Oven for Wet Oxidation

Rapid Thermal Processor AST SHS100

Programmable Heating Ofen Heraeus T6000

Zeiss Axioskop

Zeiss Axioplan with CCD camera Sony DXC 930p

Home-made Hall Mobility Measurement Setup

Ellipsometer SenTech SE400 Advanced

Four Point Probe Station Karl Süss PM5

High Frequency Analysis Probe Station Cascade Summit 9000

Temperature Controlled Measurement Setups for Electrical and Optical Characterization of VCSELs, ...

... Edge-Emitting Lasers, ...

... and Quantum Cascade Lasers (with Cryostat for Low Temperatures)

Xynetics Wafer Prober 1034XA

Home-made Optical Far-Field Measurement Setpu

Programmable Curve Tracer Sony/Tektronix 370

Spectrum Analyzer Rohde&Schwarz FSEM20

Network Analyzer Anritsu MS4662A

Network Analyzer Wiltron 360B

Home-made CV Measurement Setup