Micro- and Nanotechnology - Introduction and Definition

„There‘s plenty of room at the bottom.“ (R. Feynman, 1959)

The use of structures on a micrometer or even nanometer scale does not only lead to a higher packing density of potential devices but also shows new physical effects unknown from the every-day-experience. Therefore micro- and nanotechnology is often predicted to become the key-technology of the 21. century.

The term nanotechnology is usually used in connection with structure dimensions below 100nm showing quantum-mechanical effects. Working with structures of bigger size, one speaks of microtechnology.

Fig. 1: Ring-resonators and photonic crystals fabricated by e-beam lithography and reactive ion etching.

Electron beam ligthography provides the possibility of nano-strucurization, as required for photonic crystals, ring-resonators and sub-wavelength gratings. Photonic crystals and ring-resonators are implementet in single photon emitting device for high efficiencies. Sub-wavelength gratings provide ultra high reflectivities as requaired for surface emitting Lasers.