Micro- and Nanotechnology - Introduction and Definition

„There‘s plenty of room at the bottom.“ (R. Feynman, 1959)

The use of structures on a micrometer or even nanometer scale does not only lead to a higher packing density of potential devices but also shows new physical effects unknown from the every-day-experience. Therefore micro- and nanotechnology is often predicted to become the key-technology of the 21. century.

The term nanotechnology is usually used in connection with structure dimensions below 100nm showing quantum-mechanical effects. Working with structures of bigger size, one speaks of microtechnology.

Fig. 1: Ring-resonators and photonic crystals fabricated by e-beam lithography and reactive ion etching.
 

Electron beam ligthography provides the possibility of nano-strucurization, as required for photonic crystals, ring-resonators and sub-wavelength gratings. Photonic crystals and ring-resonators are implementet in single photon emitting device for high efficiencies. Sub-wavelength gratings provide ultra high reflectivities as requaired for surface emitting Lasers.

 

 

TUM Technische Universität München TUM Technische Universität München Physik Department Elektrotechnik und Informationstechnik TUM Technische Universität München
 

Contact

Roland Enzmann
Walter Schottky Institut E26
Am Coulombwall 3
D-85748 Garching
Germany

Phone: +49-(0)89-289-12759
Fax: +49-(0)89-289-12704
eMail: enzmann(at)wsi.tum.de

Alexander Bachmann
Walter Schottky Institut E26
Am Coulombwall 3
D-85748 Garching
Germany

Phone: +49-(0)89-289-12788
Fax: +49-(0)89-289-12704
eMail: bachmann(at)wsi.tum.de