The WSI is equipped with state-of-the-art equipment for semiconductor preparation, characterization, and device technology:

Material preparation

  • MBE and CBE machines for GaAs, InP, and Sb based heterostructures
  • Ultrahigh purity GaAs MBE machine (electron mobilities > 10 Mio cm2/Vs)
  • MBE and MOCVD machines for GaN based systems
  • MBE machines for SiGe epitaxy
  • Plasma-enhanced Si-CVD
  • UHV evaporation equipment for magnetic thin films

Characterization and spectroscopy tools

  • High resolution X-ray diffraction
  • Atomic force microscopy
  • Electron microscopy and EDX equipment
  • Photoluminescence (from IR to UV)
  • Raman spectrometers
  • DLTS, Optical DLTS, CV-profiling
  • Hall measurements and magneto-transport
  • FTIR spectroscopy
  • High frequency parameter analyzers
  • Spin resonance (ODMR, EDMR)
  • He3 cryostats with magnetic fields up to 15 and 17 Tesla

Semiconductor Technology

  • 250 m2 class 100 clean room facility with photolithography, e-beam lithography, reactive ion etching, metallization
  • Special characterization facility for laser diodes
  • Pulsed laser materials' processing

IT infrastructure

  • Microsoft Windows domain based Client/Server infrastructure with integrated Exchange 2007, Sharepoint Services, and Office Communication Server groupware
  • About 300 clients
  • High end compute servers

Our computer certificates (for download)

TUM Technische Universität München TUM Technische Universität München Physik Department Elektrotechnik und Informationstechnik TUM Technische Universität München

Events & News

17 Jan 2018

ERC Consolidator Grant for Gregor Koblmüller   more

16 Jan 2018

Light-steering of spin-polarized currents in topological insulators   more

10 Aug 2017

Best Poster Awards for Ganpath Veerabathran and Alexander Andrejew at iNOW 2017   more

27 Jun 2017

Best Poster Award at Nanowire Week for Jochen Bissinger   more

15 Mar 2017

Dr. Kai Müller admitted to the “Junges Kolleg” of the Bavarian Academy of Sciences   more


March 12, 2018

Two-dimensional coherent spectroscopy of a semiconductor microcavity   more

March 05, 2018

Diamond-organic photovoltaics   more